Jasco wafer measurement system
Resource type:
Brochure
Format:
pdf
Date of creation:
3 August 2017
Library code:
11173
FT/IR-4000/6000 series fourier transform infrared spectrometers
The Auto Y-theta stage, which can be mounted to the sample compartment of the FT/IR-4000/6000 series, enables to perform the transmittance/reflectance measurement of wafer sample up to 12 inches. This wafer measurement system is powerful tool for thickness measurement and impurity evaluation of Si wafer.
Features:
- Non-destructive and non-contact measurement by using infrared spectrometry
- High precision and reproducibility
- Various measurements are available by collaborated with optional program “Concentration quantitative program in Si”
