Norlab

Your partner in Northern Europe for innovative laboratory instruments

Thickness analysis of natural oxide film on microscopic Si pattern using MSV-5000 series

Resource type: 
Application note
Author(s): 
Jasco
Format: 
pdf
Date of creation: 
30 January 2017
Library code: 
10745

The MSV-5000 series microscopic spectrophotometer is for transmission/reflection measurement in a wide wavelength range from ultraviolet to near-infrared. It allows the measurement of the area of as small as 10 μm diameter and the built-in high-resolution camera enables to observe the samples precisely to determine the area to be measured. This instrument is most suitable to measure the minute samples or samples having microstructure. This time, the sample on which Si patterns of 35 μm widths are lined up on Ti substrate with 14 μm intervals was measured as a microstructure sample. Actually, the thickness of SiO2 formed upon Si was analyzed from the obtained reflectance spectrum, because Si is easily oxidized in the air to form thin oxide film of SiO2.